12:00 PM - 12:15 PM
[13a-A23-9] [Silicon Technology Division Award Speech] Development of polycrystalline GeSn films --Aiming for 3D-IC--
Keywords:GeSn
Oral presentation
13 Semiconductors » 13.5 Semiconductor devices and related techologies
Fri. Mar 13, 2015 9:00 AM - 12:30 PM A23 (6A-216)
12:00 PM - 12:15 PM
Keywords:GeSn