The 62nd JSAP Spring Meeting, 2015

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[13a-A24-1~13] 13.3 Insulator technology

Fri. Mar 13, 2015 9:00 AM - 12:30 PM A24 (6A-217)

11:30 AM - 11:45 AM

[13a-A24-10] Hydrogen Distribution Analysis in Al2O3 Film by Atom Probe Tomography

〇Yasuo Shimizu1, Bin Han1, Koji Inoue1, Fumiko Yano2, Masao Inoue3, Yorinobu Kunimune4, Yasuhiro Shimada4, Toshiharu Katayama4, Takashi Ide4, Yasuyoshi Nagai1 (1.IMR Tohoku Univ., 2.Tokyo City Univ., 3.Renesas, 4.RSMC)

Keywords:Atom Probe Tomography,Hydrogen,Al2O3