The 62nd JSAP Spring Meeting, 2015

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[13a-A24-1~13] 13.3 Insulator technology

Fri. Mar 13, 2015 9:00 AM - 12:30 PM A24 (6A-217)

10:00 AM - 10:15 AM

[13a-A24-5] Evaluation of Physical Properties of SiO2/Si Interfaces Deduced from XANES

〇Maho Moriya1, 2, Daisuke Kobayashi2, Tomoyuki Yamamoto1, Kazuyuki Hirose2 (1.Waseda Univ., 2.ISAS/JAXA)

Keywords:XANES,physical properties,interfaces