[13a-A24-1~13] 13.3 Insulator technology

[13a-A24-6] An in-situ Video Recording Investigation on the Formation Mechanism of Carpet-Bombing-like Concaves Formed during Time-Zero Dielectric Breakdown

〇Soushi Sato¹, Yuki Hiroi², Kikuo Yamabe², Makoto Kitabatake³, Tetsuo Endoh^{1, 4, 5}, Masaaki Niwa¹ (1.CIES, Tohoku Univ., 2.Univ. Tsukuba, 3.FUPET, 4.CSIS, Tohoku Univ., 5.Tohoku Univ.)

Keywords:silicon carbide,dielectric breakdown