The 62nd JSAP Spring Meeting, 2015

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Oral presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[13a-A25-1~13] 13.2 Exploratory Materials, Physical Properties, Devices

Fri. Mar 13, 2015 9:00 AM - 12:30 PM A25 (6A-218)

11:30 AM - 11:45 AM

[13a-A25-10] High Density Formation of Fe-silicide Nanodots Induced by Remote H2 Plasma and Characterization of Their Magnetic Properties

〇Hai Zhang1, Katsunori Makihara1, Akio Ohta2, Yuuki Kabeya1, Seiichi Miyazaki1 (1.Nagoya Univ., 2.Nagoya Univ. VBL)

Keywords:Fe-silicide Nanodots,Magnetic Properties,H2 Plasma