The 62nd JSAP Spring Meeting, 2015

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8 Plasma Electronics » 8.3 deposition of thin film and surface treatment

[13a-A27-1~13] 8.3 deposition of thin film and surface treatment

Fri. Mar 13, 2015 9:00 AM - 12:30 PM A27 (6A-202)

9:00 AM - 9:15 AM

[13a-A27-1] Deposition Rate Evaluation of VHF-DC Superimposed Magnetron Sputter

〇Takashi Fukui1, Yuushi Fukuoka1, Noriharu Takada2, Kensuke Sasai1, Hirotaka Toyoda1, 3 (1.Nagoya Univ., 2.Technical Center, 3.PLANT, Nagoya Univ.)

Keywords:plasma