ITO thin films fabricated by hybrid facing-target sputtering on PET films

Presentation information

Oral presentation

8 Plasma Electronics » 8.3 deposition of thin film and surface treatment

Fri. Mar 13, 2015 9:00 AM - 12:30 PM A27 (6A-202)

9:15 AM - 9:30 AM

〇Shinichi Morohashi¹, Tsukasa Tanimoto¹, Keisuke Tsujita¹, Shunya Arakawa¹, Naoyuki Harada¹, Takuya Murata¹ (1.Yamaguchi Univ.)

Keywords:hybrid facing-target sputtering,ITO thin films,PET films