[13a-A27-1~13] 8.3 deposition of thin film and surface treatment

△ [13a-A27-8] Film thickness dependence on physical properties of Ni films prepared on ABS resin using Multipolar Magnetic Plasma Confinement assisted by Inductively Coupled Plasma

〇Tomomi Suwa¹, Sho Miyashita¹, Tatsunori Koda¹, Suguru Morihisa¹, Hiroshi Toyota¹ (1.Hiroshima Inst. Tech.)

Keywords:ABS resin,Sputtering,Ni thin film