The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.3 Oxide electronics

[13a-D10-1~10] 6.3 Oxide electronics

Fri. Mar 13, 2015 9:00 AM - 11:45 AM D10 (16-305)

9:30 AM - 9:45 AM

▲ [13a-D10-3] Electrostatic Carrier Doping to KTaO3 Using Organic Parylene-C/High-k Oxide Hybrid Gate Insulator

〇TINGTING WEI1, 2, Kohei Fujiwara1, Hidekazu Takana1 (1.ISIR Osaka Univ., 2.Kunming Sci Tech Univ)

Keywords:FET,hybrid gate insulator