The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[13a-P14-1~14] 13.4 Si wafer processing /MEMS/Integration technology

Fri. Mar 13, 2015 9:30 AM - 11:30 AM P14 (Gymnasium)

9:30 AM - 11:30 AM

△ [13a-P14-1] Crystallzation of Ge Thin Films by Cosputtering of Ge and Au(II)

〇Takatoshi Sugiyama1, Masao Kamiko2, Kentaro Kyuno1 (1.Shibaura Institute of Technology, 2.IIS,University of Tokyo)

Keywords:Crystallization