[13a-P14-1~14] 13.4 Si wafer processing /MEMS/Integration technology

▲ [13a-P14-3] First Trial Fabrication of Poly-Si TFTs using Crystallization-Induction Layers of Yttria-Stabilized Zirconia and Pulsed Laser Annealing Crystallization Methods

〇Lien Mai¹, Masayuki Yamano², Tatsuaki Hirata², Shin-Ichiro Kuroki², Susumu Horita¹ (1.JAIST, 2.Hiroshima Univ.)

Keywords:pulsed laser crystallization,poly-Si,TFT