The 62nd JSAP Spring Meeting, 2015

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Poster presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[13a-P14-1~14] 13.4 Si wafer processing /MEMS/Integration technology

Fri. Mar 13, 2015 9:30 AM - 11:30 AM P14 (Gymnasium)

9:30 AM - 11:30 AM

△ [13a-P14-4] Controllability of Self-Aligned Planar Metal Double-Gate Four-Terminal LT Poly-Si TFTs on Glass Substrate

〇Hiroki Ohsawa1, Shun Sasaki1, Akito Hara1 (1.Tohoku Gakuin Univ.)

Keywords:TFT,Si,Poly-Si