The 62nd JSAP Spring Meeting, 2015

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Poster presentation

15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[13a-P17-1~2] 15.8 Crystal evaluation, impurities and crystal defects

Fri. Mar 13, 2015 9:30 AM - 11:30 AM P17 (Gymnasium)

9:30 AM - 11:30 AM

[13a-P17-1] Observations of vacancy and interstitial distributions during CZ silicon growth by detaching from melt

〇Takao Abe1, Toru Takahashi1, Koun Shirai2 (1.ShinEtsu Handotai, 2.Osaka Univ.)

Keywords:CZ,Si,point defects