[13a-P17-1~2] 15.8 Crystal evaluation, impurities and crystal defects

[13a-P17-2] Observation of strain field in Al ion-implanted silicon carbide crystals by X-ray grazing incidence topography and local rocking curve imaging

〇Yumiko Takahashi¹, Keiichi Hirano¹, Jun-ichi Yoshimura¹, Yoshiki Yamashita¹, Takayoshi Shimura², Shinji Nagamachi³ (1.KEK-PF, 2.Osaka Univ., 3.Nagamachi Science Laboratory Co., Ltd.)

Keywords:topography,rocking curve,SiC