The 62nd JSAP Spring Meeting, 2015

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Poster presentation

Joint Session K » Joint Session K （Poster）

[13a-P18-1~22] Joint Session K （Poster）

Fri. Mar 13, 2015 9:30 AM - 11:30 AM P18 (Gymnasium)

9:30 AM - 11:30 AM

[13a-P18-16] Growth of β-Ga2O3 Films and Nanostructures by Atmospheric-pressure Chemical Vapor Deposition Using Ga and H2O as Source Materials

〇Tomoaki Terasako1, Hikaru Ichinotani2, Akira Miyata2, Masakazu Yagi3 (1.Grad. School Sci. & Eng., Ehime Univ, 2.Fac. Eng., Ehime Univ., 3.Natl. Inst. Technol., Kagawa Coll.)

Keywords:Ga2O3,CVD,nanowires