The 62nd JSAP Spring Meeting, 2015

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Poster presentation

Joint Session K » Joint Session K （Poster）

[13a-P18-1~22] Joint Session K （Poster）

Fri. Mar 13, 2015 9:30 AM - 11:30 AM P18 (Gymnasium)

9:30 AM - 11:30 AM

[13a-P18-17] Evaluation of Trap States in Amorphous In-Ga-Zn-O by DLTS method Using heterojunction Diodes (2)

〇Shuji Kosaka1, Yoshihiro Yokota1, Hiroshi Okada1 (1.KOBELCO Research Institute, Inc.)

Keywords:DLTS,IGZO