The 62nd JSAP Spring Meeting, 2015

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Poster presentation

Joint Session K » Joint Session K （Poster）

[13a-P18-1~22] Joint Session K （Poster）

Fri. Mar 13, 2015 9:30 AM - 11:30 AM P18 (Gymnasium)

9:30 AM - 11:30 AM

[13a-P18-22] Influence of source/drain etching damage on effective channel length of IGZO TFT

〇Daichi Koretomo1, Tatyuya Toda1, Dapeng Wang1, 2, Mamoru Furuta1, 2 (1.Kochi Univ. of Tech, 2.Center for nanotech)

Keywords:TFT,IGZO