The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[13p-A21-1~9] 6.1 Ferroelectric thin films

Fri. Mar 13, 2015 4:15 PM - 6:30 PM A21 (6A-213)

4:30 PM - 4:45 PM

[13p-A21-2] Crystallographic analysis of epitaxial HfO2-based films containing orthorhombic phase

〇Kiliha Katayama1, Takao Shimizu2, Tatsuhiko Yokouchi1, Takahisa Shiraishi1, Takahiro Oikawa1, Takanori Kiguchi3, Akihiro Akama3, Toyohiko Konno3, Hiroshi Uchida4, Hiroshi Funakubo1, 2 (1.Tokyo Tech. IGS, 2.Tokyo Tech. MECS, 3.Tohoku Univ. IMR, 4.Sophia Univ. FST)

Keywords:ferroelectrics,hafnia,orthorhombic