[13p-A23-1~10] 13.5 Semiconductor devices and related techologies

[13p-A23-1] Evaluation of sulfurization process of Mo toward large scale MoS₂ film

〇(B)kentarou matsuura¹, Takumi Ohashi¹, Shimpei Yamaguchi¹, Kohei Suda², Ishihara Seiya², Naomi Sawamoto², Kuniyuki Kakushima¹, Nobuyuki Sugii¹, Akira Nishiyama¹, Yoshinori Kataoka¹, Kenji Natori¹, Kazuo Tsutsui¹, Hiroshi Iwai¹, Atsushi Ogura², Hitoshi Wakabayashi¹ (1.Tokyo Tech., 2.Meiji Univ.)

Keywords:Molybdenum disulfide (MoS2),sulfurization process,large scale