Optimization of Cylindrical Cavity Excitation for Large-Area Microwave Plasma Generation II

Presentation information

Oral presentation

8 Plasma Electronics » 8.1 Plasma production and control

Fri. Mar 13, 2015 4:30 PM - 7:00 PM A28 (6A-203)

6:00 PM - 6:15 PM

〇(B)Yuichi Hasegawa¹, Daisuke Ogawa¹, Keiji Nakamura¹, Satoru Kobayashi², Hideo Sugai³ (1.Chubu Univ., 2.Applied Materials, 3.NISRI)

Keywords:Microwave Plasma,Cylindrical Cavity