The 62nd JSAP Spring Meeting, 2015

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Joint Session K » Joint Session K

[13p-D1-1~11] Joint Session K

Fri. Mar 13, 2015 4:15 PM - 7:15 PM D1 (16-101)

6:30 PM - 6:45 PM

△ [13p-D1-9] NiO buffer layer enhanced low-temperature epitaxial growth of β-Ga2O3 thin films by PLD

〇Daiji Fukuda1, Daishi Shiojiri1, Ryosuke Yamauchi1, Nobuo Tsuchimine2, Satoru Kaneko1, 3, Akifumi Matsuda1, Mamoru Yoshimoto1 (1.Tokyo Inst. of Tech., 2.TOSHIMA Manu. co., Ltd., 3.Kanagawa Ind. Tech. Center)

Keywords:Ga2O3,PLD,Low temperature crystal growth