[13p-D4-1~11] 15.3 III-V-group epitaxial crystals

[13p-D4-7] Local Composition Analysis of Ternary Compound Semiconductors by Selective Area Metal Organic Chemical Vapor Deposition in Narrow Trenches

〇Daisuke Ohba¹, Yoshiyuki Kondo¹, Isao Gunji¹, Yoji Iizuka¹, Masakazu Sugiyama², Shigetoshi Hosaka¹ (1.Tokyo Electron Ltd., 2.The Univ. of Tokyo)

Keywords:selective area growth,MOSFET,inter-surface diffusion