[13p-P17-1~24] 13.8 Compound and power electron devices and process technology

[13p-P17-23] Low resistance ohmic contact on AlGaN/GaN heterostructures grown on GaN substrate

〇Daryoush H. Zadeh¹, Shinichi Tanabe¹, Noriyuki Watanabe¹, Hideaki Matsuzaki¹ (1.NTT Dev. Tech. Labs.)

Keywords:AlGaN/GaN,ohmic contact,bulk GaN substrate