The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.3 Insulator technology

[14a-A24-1~12] 13.3 Insulator technology

Sat. Mar 14, 2015 9:00 AM - 12:15 PM A24 (6A-217)

10:00 AM - 10:15 AM

△ [14a-A24-5] Evidence of emission of Ge atoms from Ge surface during thermal oxidation of Al2O3/Ge structure

〇Shigehisa Shibayama1, 2, Kaoru Nakajima3, Mitsuo Sakashita1, Osamu Nakatsuka1, Kenji Kimura3, Shigeaki Zaima1, 4 (1.Nagoya Univ., 2.JSPS, 3.Kyoto Univ., 4.ESI Nagoya Univ.)

Keywords:Germanium,Al2O3,oxidation