The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[14a-A25-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

Sat. Mar 14, 2015 9:00 AM - 12:00 PM A25 (6A-218)

10:15 AM - 10:30 AM

[14a-A25-6] Investigation of surface potential distributions around grain boundaries in BaSi2 thin-films by RF sputtering

〇(B)Seiya Yokoyama1, Nurul A. A. Latiff1, Masakazu Baba1, Li Yunpeng1, Masami Mesuda2, Hideto Kuramochi2, Kaoru Toko1, Takashi Suemasu1, 3 (1.Univ. Tsukuba, 2.Tosoh Corporation, 3.JST-CREST)

Keywords:semiconductor,KFM,silicide