Correlation between Si/SiO<sub>2</sub> interface state density and indoor absolute humidity

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

Sat. Mar 14, 2015 9:00 AM - 12:00 PM A29 (6A-204)

11:00 AM - 11:15 AM

〇Hitoshi Asano¹, Fumito Imura¹, Kazuhiro Koga¹, Sommawan Khumpuang^1,², Shiro Hara^1,² (1.MINIMAL, 2.AIST)

Keywords:Interface state