The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[14a-A29-1~11] 13.4 Si wafer processing /MEMS/Integration technology

Sat. Mar 14, 2015 9:00 AM - 12:00 PM A29 (6A-204)

11:15 AM - 11:30 AM

[14a-A29-9] pMOSFET Inverters Fabricated by Full MINIMAL Equipment

〇Fumito Imura1, Shingo Ura2, Yuji Kitayama1, Kazuhiro Koga1, Hitoshi Asano1, Katsuhiko Nakato1, Sommawan Khumpuang1, 3, Shiro Hara1, 3 (1.MINIMAL, 2.Logic Research, 3.AIST)

Keywords:minimal