The 62nd JSAP Spring Meeting, 2015

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15 Crystal Engineering » 15.6 Group IV Compound Semiconductors

[14a-B4-1~13] 15.6 Group IV Compound Semiconductors

Sat. Mar 14, 2015 9:00 AM - 12:30 PM B4 (6B-104)

10:00 AM - 10:15 AM

[14a-B4-5] Al doping of 4H-SiC by Laser Irradiation to Al film deposited on the surface

〇Akihiro Ikeda1, Rikuho Sumina1, Hiroshi Ikenoue1, Tanemasa Asano1 (1.Kyushu Univ.)

Keywords:4H-SiC,Laser Doping,p-type