[14a-B4-1~13] 15.6 Group IV Compound Semiconductors

[14a-B4-7] Electrical Characteristics of SiC Schottky Diode with Ti and TiC Electrodes

〇(B)Tomoyuki Suzuki¹, Mari Okamoto², Shu Munekiyo², Kuniyuki Kakushima², Yoshinori Kataoka², Akira Nishiyama², Nobuyuki Sugii², Hitoshi Wakabayashi², Kazuo Tsutsui², Kenji Natori¹, Hiroshi Iwai¹ (1.Tokyo Tech. FRC, 2.Tokyo Tech. IGSSE)

Keywords:Schottky diode,Silicon Carbide,Electrode