The 62nd JSAP Spring Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.6 Ion beams

[14a-C1-1~11] 7.6 Ion beams

Sat. Mar 14, 2015 9:00 AM - 12:00 PM C1 (6C-104)

10:45 AM - 11:00 AM

[14a-C1-7] Transportation characteristic of Ar cluster ion beam at low vacuum pressure

〇Kanji Suzuki1, Toshio Seki1, Takaaki Aoki1, Jiro Matsuo1 (1.Kyoto Univ.)

Keywords:GCIB,SIMS