The 62nd JSAP Spring Meeting, 2015

Presentation information

Print

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[14p-A29-1~8] 13.4 Si wafer processing /MEMS/Integration technology

Sat. Mar 14, 2015 1:00 PM - 3:00 PM A29 (6A-204)

2:30 PM - 2:45 PM

[14p-A29-7] Fluctuation factor analysis of a lithography process with MINIMAL equipment

〇Yuuji Kitayama1, Syuuji Okuda1, Yasuhide Higashino1, Kouyu Houchi1, Sommawan Khumpuang1, 2, Shiro Hara1, 2 (1.MINIMAL, 2.AIST)

Keywords:MINIMAL,Lithography