The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[14p-A29-1~8] 13.4 Si wafer processing /MEMS/Integration technology

Sat. Mar 14, 2015 1:00 PM - 3:00 PM A29 (6A-204)

2:45 PM - 3:00 PM

[14p-A29-8] Cleanroom-Free Minimal Air Circulation System for PLAD (IV)

〇Takashi Yajima1, Masaharu Yasui1, Khumpuang Sommawan1, 2, Hitoshi Maekawa1, 2, Shiro Hara1, 2 (1.MINIMAL, 2.AIST)

Keywords:minimal fab