ryou Kanou

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 9:00 AM - 11:45 AM B9 (Exhibition Hall)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[13a-B9-1~11] 8.4 Plasma etching

9:30 AM - 9:45 AM

[13a-B9-3] Precise etching rate control of Inward-plasma

〇ryou Kanou^1,3, Hiroshi Suga¹, Shun'ichiro Shimbori², Satoshi Takahashi², Jun Miyawaki³, Toshitaka Kubo³, Atsushi Ando³, Tetsuo Shimizu³ (1.CIT, 2.Sunyou Co.,Ltd, 3.AIST)

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