Hayato Okamoto

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 9:00 AM - 12:15 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[16a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

9:45 AM - 10:00 AM

△ [16a-B10-4] Fabrication of Low Resistivity Metal/Ge Contact with Amorphous Zr-Ge-N Interlayer

〇Hayato Okamoto¹, Keisuke Yamamoto², Dong Wang¹, Hiroshi Nakashima² (1.IGSES, Kyushu Univ., 2.KASTEC, Kyushu Univ.)