Makato Moriyama

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 2:45 PM - 4:15 PM A41 (Int'l Conf. Room)

Oral presentation
| 8 Plasma Electronics
| 8.8 Plasma Electronics English Session

[13p-A41-3~8] 8.8 Plasma Electronics English Session

2:45 PM - 3:00 PM

▼ [13p-A41-3] Effect of Width and Number of Slits in Faraday Shield on the Performance of Inductively Coupled Plasma

〇(M1)Makato Moriyama¹, Daisuke Ogawa¹, Ivan Ganachev^1,2, Keiji Nakamura¹ (1.Chubu Univ., 2.Shibaura Mechatronics)