Gento Kuroda

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 9:00 AM - 11:45 AM B9 (Exhibition Hall)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[13a-B9-1~11] 8.4 Plasma etching

10:00 AM - 10:15 AM

[13a-B9-5] Structural analyses on the outermost surface of Si etched in Ar/CF₄ plasmas

〇(M1)Gento Kuroda¹, Kazuo Takahashi¹, Koji Nishio¹ (1.Kyoto Institute of Technology)