Haruo Sudo

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 11:45 AM A23 (201B)

Oral presentation
| 15 Crystal Engineering
| 15.8 Crystal evaluation, impurities and crystal defects

[15a-A23-1~10] 15.8 Crystal evaluation, impurities and crystal defects

10:45 AM - 11:00 AM

[15a-A23-7] Annihilation behavior of void defects in nitrogen doped Cz-Si wafers by ultrahigh-temperature RTP

〇Haruo Sudo¹, Koji Araki¹, Tatsuhiko Aoki¹, Takeshi Senda¹, Susumu Maeda¹ (1.GlobalWafers Japan)