10:15 〜 10:30 ▼ [13a-A23-2] Deposition Temperature Dependency of Characteristics of PMnN-PZT Epitaxial Thin Film on Si Prepared by Sputter Deposition with Fast Cooling 〇(M2)Zhen Zhou1、Shinya Yoshida1、Shuji Tanaka1 (1.Tohoku Univ.)