10:15 AM - 10:30 AM ▼ [13a-A23-2] Deposition Temperature Dependency of Characteristics of PMnN-PZT Epitaxial Thin Film on Si Prepared by Sputter Deposition with Fast Cooling 〇(M2)Zhen Zhou1, Shinya Yoshida1, Shuji Tanaka1 (1.Tohoku Univ.)