Puneet Jain

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 9:30 AM - 11:30 AM P4 (Exhibition Hall)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16a-P4-1~8] 13.3 Insulator technology

9:30 AM - 11:30 AM

▲ [16a-P4-3] Effect of Added Organic Solution on Low-Temperature Deposition of SiO_x Films by APCVD using Silicone Oil and Ozone Gas

〇(D)Puneet Jain¹, Susumu Horita¹ (1.Japan Adv. Inst. Sci. & Tech. (JAIST))