9:30 AM - 11:30 AM
▲ [16a-P4-3] Effect of Added Organic Solution on Low-Temperature Deposition of SiOx Films by APCVD using Silicone Oil and Ozone Gas
Keywords:Silicon Oxide Film, Low-Temperature Deposition, APCVD
SiOx films are formed by APCVD using silicone oil and ozone. These films have non-negligible amout of Si-OH bonds due to H2O. In order to enhance deposition rate and reduce amount of Si-OH bond, we tried to add some organic solution to silicon oil vapor and O3 gas. Adding organic solution was found to influence the deposition rate strongly and content of Si-OH bond slightly. In the meeting, we will show more detailed data under various deposition conditions and discuss them.