Shinichi Morohashi

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 1:15 PM - 4:45 PM B7 (Exhibition Hall)

Oral presentation
| 8 Plasma Electronics
| 8.3 deposition of thin film and surface treatment

[16p-B7-1~13] 8.3 deposition of thin film and surface treatment

1:45 PM - 2:00 PM

[16p-B7-3] Comparison of hybrid facing-target sputtering and conventional facing-target sputtering in fabrication of ITO thin films

〇Shinichi Morohashi^1,2, Tanimoto Tsukasa¹, Tsujita Keisuke¹ (1.Yamaguchi Univ., 2.AIST)