YongJun Seo

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Speaker, Author, Co-Author

Wed. Sep 14, 2016 1:30 PM - 3:30 PM P5 (Exhibition Hall)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[14p-P5-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

1:30 PM - 3:30 PM

▲ [14p-P5-5] Fabrication of Ferrite Cantilevers using a Dual Beam FIB/SEM

〇(P)YongJun Seo^1,2, Kazuya Harii^1,3, Ryo Takahashi^1,3, Hiroyuki Chudo^1,3, Koichi Oyanagi⁴, Zhiyong Qiu², Takahito Ono⁵, Yuki Shiomi^1,4, Eiji Saitoh^1,2,3,4 (1.ERATO SQR project, 2.AIMR, 3.JAEA, 4.IMR, 5.Tohoku Univ.)

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