The 77th JSAP Autumn Meeting, 2016

Yushi Iijima

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 12:00 PM A26 (203-204)

  • Oral presentation
  • | 6 Thin Films and Surfaces
  • | 6.2 Carbon-based thin films

[15a-A26-1~11] 6.2 Carbon-based thin films

11:00 AM - 11:15 AM

△ [15a-A26-8] Formation of Nitrogen-Containing DLC Film by PVD-CVD Hybrid Process

〇Yushi Iijima1, Takahiro Imai1, Ryo Isono1, Toru Harigai1, Yoshiyuki Suda1, Hirofumi Takikawa1, Masao Kamiya2, Makoto Taki3, Yushi Hasegawa3, Nobuhiro Tsuji3, Satoru Kaneko4, Shinsuke Kunitsugu5, Sam Yick6, Avi Bendavid6, Phil Martin6, Hitoe Habuchi7 (1.Toyohashi Univ. Technol., 2.Itoh Opt. Ind., 3.Onward Ceram. Coat., 4.Kanagawa Ind. Technol., 5.Okayama Ind. Technol., 6.CSIRO, 7.Gifu Natl. Coll. Technol.)