[15a-A26-1~11] 6.2 Carbon-based thin films

△ [15a-A26-8] Formation of Nitrogen-Containing DLC Film by PVD-CVD Hybrid Process

〇Yushi Iijima¹, Takahiro Imai¹, Ryo Isono¹, Toru Harigai¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Masao Kamiya², Makoto Taki³, Yushi Hasegawa³, Nobuhiro Tsuji³, Satoru Kaneko⁴, Shinsuke Kunitsugu⁵, Sam Yick⁶, Avi Bendavid⁶, Phil Martin⁶, Hitoe Habuchi⁷ (1.Toyohashi Univ. Technol., 2.Itoh Opt. Ind., 3.Onward Ceram. Coat., 4.Kanagawa Ind. Technol., 5.Okayama Ind. Technol., 6.CSIRO, 7.Gifu Natl. Coll. Technol.)

Keywords:DLC, Plasma