Noriyuki Taoka

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 9:00 AM - 12:30 PM B1 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[16a-B1-1~13] 13.8 Compound and power electron devices and process technology

11:00 AM - 11:15 AM

[16a-B1-8] ALD Temperature Dependence of Surface Potential Fluctuation at GaN MOS Interfaces

〇Noriyuki Taoka¹, Toshiharu Kubo², Toshikazu Yamada¹, Takashi Egawa², Mitsuaki Shimizu¹ (1.AIST, 2.Nagoya Inst. Tech)