akihiro nakao

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 1:30 PM - 3:30 PM P3 (Exhibition Hall)

Poster presentation
| 8 Plasma Electronics
| 8.5 nanotechnology.

[16p-P3-1~2] 8.5 nanotechnology.

1:30 PM - 3:30 PM

[16p-P3-1] Simulated Microstructures for Glancing-angle Evaporation and Sputtering
in Reactive Gas Environments

〇(M2)akihiro nakao¹, Inoue Yasushi¹, Takai Osamu² (1.Chiba Inst. Technol., 2.Kanto Gakuin Univ.)