Hiroya Ikeda

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Speaker, Author, Co-Author

Wed. Sep 14, 2016 9:00 AM - 12:00 PM B12 (Exhibition Hall)

Oral presentation
| Joint Session M "Phonon Engineering"
| Joint Session M "Phonon Engineering"

[14a-B12-1~11] 22.1 Joint Session M "Phonon Engineering"

11:45 AM - 12:00 PM

[14a-B12-11] Thermal diffusivity measurement of AlN thin films formed by ion sputtering

〇Hiroya Ikeda^1,2, Masaya Wanami^1,2, Yuya Ota¹, Shuhei Asada³, Yuhei Suzuki¹, Shuichiro Hashimoto³, Takashi Matsukawa⁴, Yasuhiro Hayakawa^1,2, Hiroshi Inokawa^1,2, Masaru Shimomura², Kenji Murakami², Takanobu Watanabe³ (1.RIE, Shizuoka Univ., 2.GSIST, Shizuoka Univ., 3.Waseda Univ., 4.AIST)

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