Tadashi Yamamoto

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 10:00 AM - 11:45 AM A23 (201B)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[13a-A23-1~7] 6.1 Ferroelectric thin films

10:45 AM - 11:00 AM

[13a-A23-4] Development of Dry etching process for high-performance Piezoelectric MEMS Device

〇Tadashi Yamamoto¹, Hiroki Kobayashi¹, Takehito Jimbo¹, Ryuuichirou Kamimura¹ (1.ULVAC)