Wataru Yashiro

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 9:00 AM - 12:30 PM A25 (202)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.4 Buried interface sciences with quantum beam

[13a-A25-1~11] 7.4 Buried interface sciences with quantum beam

9:45 AM - 10:00 AM

[13a-A25-4] Toward Structure Analysis for Surface Microstrucrues with Sizes Less Than 100 nm Using an X-ray Grating Interferometer

〇Wataru Yashiro^1,2, Kosuke Kato³, Susumu Ikeda⁴, Yasuo Wada⁵, Yoshio Suzuki⁶, Akihisa Takeuchi⁶ (1.IMRAM, Tohoku Univ., 2.JST, ERATO, 3.GSE, Tohoku Univ., 4.AIMR, Tohoku Univ., 5.Keio Univ., 6.JASRI)

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